Silicon Carbide Coated Graphite Plates Description
Silicon carbide coated graphite plates are produced by depositing a fine silicon carbide layer onto the surface of high‐purity isotropic graphite using the CVD process (Chemical Vapor Deposition). SiC‐coated graphite plates are employed in the semiconductor industry and in coating applications.
The CVD process yields a silicon carbide coating with a purity that approaches its theoretical density and is free from porosity. Silicon carbide is hard and may be polished to a reflective finish. The CVD process for silicon carbide (SiC) produces a high‐grade surface and wear resistance. In addition, the coated products maintain performance in high vacuum and at elevated temperatures, thereby making them suitable for use in the semiconductor industry and other environments requiring minimal contamination.
Stanford Advanced Materials also supplies silicon carbide coated graphite plates.
Silicon Carbide Coated Graphite Plates Specifications
Compound Formula
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SiC
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Molecular Weight
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40.1
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Appearance
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Black
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Melting Point
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2 730℃ (4 946℉) (decomposes)
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Density
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3.0 to 3.2 g/cm³
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Electrical Specific Resistance
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1 to 4 10x Ω-m
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Poisson's Ratio
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0.15 to 0.21
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Specific Heat
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670 to 1180 J/kg-K
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Coating Thickness
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50~500 µm
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Advantages of Silicon Carbide Coated Graphite Plates
- The silicon carbide layer is hard and remains stable at high temperatures. It demonstrates resistance to oxidation, corrosion and chemicals.
- SiC-coated graphite prevents the separation and dispersion of graphite particles as well as the emission of gases and contaminants from the graphite matrix.
Applications of Silicon Carbide Coated Graphite Plates
- The CVD process for silicon carbide is employed in the semiconductor industry, for example in MOCVD susceptors, RTP and oxidation chambers, given that silicon nitride exhibits resistance to temperature fluctuations and can withstand high-energy plasmas.
- Silicon carbide is used in the semiconductor and coating industries.
Silicon Carbide Coated Graphite Shells Packaging
Our silicon carbide coated graphite shells are handled with care to minimise damage during storage and transport, thereby preserving the product quality in its original state.