Discontinued (Discontinued) GR5613 PECVD Graphite Boat

PECVD Graphite Boat Description

The PECVD Graphite Boat serves as a carrier for standard silicon wafers during the coating process. It contains multiple boat plates arranged at specified intervals, with very narrow gaps between adjacent boat plates. Silicon wafers are placed on both sides of the empty door. Since graphite possesses excellent conductivity and thermal conductivity, an alternating voltage is applied between two adjacent boats to establish positive and negative electrodes. Under a specific air pressure and gas within the chamber, a glow discharge occurs between the two boats. This glow discharge can decompose SiH4 and NH3 gases in the chamber, generating Si and N ions that combine to form SiNx molecules.

The PECVD (Plasma Enhanced Chemical Vapor Deposition) graphite boat is a specialised container made of graphite, utilised in the PECVD process for the deposition of thin films on various substrates. In semiconductor manufacturing and other industries where thin film deposition is essential, these graphite boats hold and transport the substrates (e.g., silicon wafers) through the PECVD chamber, where the deposition process transpires.

Specifications for PECVD Graphite Boats

Applications of PECVD Graphite Boats

• Semiconductor Manufacturing: Graphite boats are extensively used in semiconductor manufacturing for the deposition of various types of thin films, including dielectrics, conductors, and semiconductors.
• Solar Panels: During the production of solar cells, PECVD graphite boats are employed for depositing anti-reflective coatings and other layers that enhance the efficiency of the solar cells.
• Optoelectronics: In components that require precise optical properties, layers with specific refractive indices are deposited using PECVD, and graphite boats carry the substrates through this process.

PECVD Graphite Boat Packaging

Our PECVD Graphite Boat is handled carefully during storage and transport to maintain the quality of our product in its original condition.