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ST11214 Tantalum Planar Target, Ta Target

Catalogue Number ST11214
Composition Ta
Purity ≥99.95%, or customized
Form Target
Shape Rectangular
Dimensions Customized

Tantalum Planar Target, Ta Target is a sputtering target manufactured from high-purity tantalum for thin film deposition processes. Stanford Advanced Materials (SAM) utilises automated casting and precision ultrasonic cleaning paired with electron microscopy inspections for quality control. SAM's process minimises microstructural defects while ensuring uniform composition, thus supporting efficient deposition in industrial sputtering systems.

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FAQ

How does tantalum purity affect sputtering uniformity?

Increased purity reduces inclusion levels, which minimises particulate generation during sputtering. This consistency in target composition helps to ensure uniform thin film deposition across substrates. Contact us for further technical details.

What quality control measures are applied to detect microstructural defects?

SAM employs electron microscopy and ultrasonic inspection techniques to identify microstructural irregularities. These measures facilitate early detection of defects, ensuring that the target’s surface integrity meets the stringent demands of sputtering applications.

Is customisation of the target’s dimensions feasible for specific sputtering systems?

Yes, dimensions and related specifications are customisable to accommodate various sputtering system designs. This flexibility allows for optimal target utilisation and process adjustment in semiconductor fabrication and other thin film deposition applications.

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