Discontinued MF5927 (Discontinued) 1200C 3 Zone Furnace with Sliding Flange, Gas Mixer & Vacuum Pump OTF-1200X-5-III-SF

Furnace Structure

• The double-layer steel casing with two cooling fans ensures a low surface temperature.
• The energy-efficient, high-purity fibre-alumina insulation provides excellent heat management.
• One flange is mounted on a sliding rail to facilitate loading and unloading of samples, while the other sealing flange is equipped with a digital vacuum gauge for precise measurements.

Power

7KW, 208-240VAC, single-phase, 50/60Hz

Operating Temperature

• Max. Temperature: 1200°C (1 hour); 1100°C (continuous)
• Heating rate: ≤20°C/min
• Temperature accuracy: ±1.0°C

Length of Heating Zones

• Three zones: (900mm, total 36")

Zone 1: 229mm (9")

Zone 2: 457mm (18.0")

Zone 3: 229mm (9")

Constant Temperature Zone

• When all three zones are set to the same temperature, the constant temperature zone measures 25" (625mm) long, with a temperature variation of ±1°C.
• If only one zone (the middle zone) is used, the constant temperature zone measures 4.3" (110mm) long, with a temperature variation of ±1°C.

Heating Elements

Fe-Cr-Al alloy doped with Molybdenum

Temperature Controller

• Three precision temperature controllers for separate regulation of the three zones
• Automatic PID control with 30 programmable segments for precise control of heating rate, cooling rate, and hold time
• Built-in protection against overheating and faulty thermocouples
• Overtemperature protection and alarm allow for operation without supervision
• ±1°C temperature accuracy
• RS485 communication interface

Vacuum Sensor & Display

• Corrosion-resistant capacitance manometer with a ceramic-coated sensor head, specifically designed for vacuum measurements in the presence of corrosive gases
• The gauge is installed on the vacuum flange of the tube furnace and offers a broad measurement range (10^-5 ~ 1000 Torr)

Tube Size and Flange

• 130mm outer diameter x 120mm inner diameter x 1400mm, including quartz glass tube
• Vacuum flanges with valves and manometers are included

Sliding Rail

800mm long sliding rail with an end flange for easy loading and unloading of samples

• The 2"-quartz boat on the sliding rail holder can be used for diffusion, oxidation, and annealing.
• The 5" quartz tube can accommodate a 4" quartz wafer boat without a holder.

Weight

~70kg

Dimensions

1080 x 430 x 600mm

Warranty

One-year limited manufacturer warranty.

Warnings and Notices

• To achieve accurate temperature inside the tube furnace, calibration of the temperature is necessary. Please contact us for further information.
• Warning: Tube furnaces with quartz tubes are designed for use in vacuum and at low pressure < 0.2 bar / 3 psi.
• Caution! For safe operation, a two-stage pressure regulator must be installed on the gas cylinder to limit pressure to below 3 PSI.
• Definition of vacuum limits for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C.

Certification

• CE certified
• An NRTL or CSA certification is available for an additional fee.