Discontinued IF5320 (Discontinued) 650C Two Zones CSS Furnace for Rapid Thermal Processing OTF-1200X-RTP-II

Construction of the Furnace and Vacuum Chamber

• Two heating elements, two temperature controllers, and a dual-channel gas flow meter are integrated into a mobile frame made of aluminium alloy.
• The chamber is constructed from high-purity quartz glass tube.
• Size of the quartz tube: 11" OD/10.8" ID x 9" H.
• Carbon fibre felt acts as thermal insulation.
• The vacuum flanges are made from stainless steel 316.
• Overall dimensions: 850(L) × 745(W) × 1615(H) mm.

Vacuum Flanges

• The upper flange comes with a KFD-25 vacuum connection and two gas outlets (1/4" pipe required) that can be manually adjusted up or down for easy loading and unloading of substrates and evaporated material.
• The lower flange has a KFD-25 vacuum connection with two gas inlets (1/4" pipe required) and needle valves.
• The flange is sealed with dual silicone O-rings and can achieve a maximum vacuum pressure of 10E-2 Torr with a high-quality mechanical pump and 10E-5 Torr with a molecular pump.
• A digital precision vacuum gauge with corrosion protection is included.

Heating and Sample Holding

• Two short-wave IR lamps serve as heating elements for rapid heating.
• The distance between the two heaters is adjustable from 10 to 50 mm.
• The heating elements are made of stainless steel with a water-cooled jacket to reduce heat radiation and facilitate rapid cooling.
• A round 3" wafer holder is mounted in the upper heater to load the substrate.
• A highly thermally conductive AlN plate (3" Dia x 0.5mm thick) is included to be placed on the back of the substrate to ensure even heating.
• A 3" graphite plate may alternatively be used in place of the AlN plate.
• A replacement halogen heating unit is available at an additional cost.

Temperature Controllers

• Two digital precision temperature controllers with 30 programmable segments for independent control of the upper and lower heaters.
• Each controller features a PID autotuning function to protect the heating elements from overshooting, along with an alarm function to prevent overheating and breakage of the thermal coupling.
• A PC communication interface and software are installed.

Operating Temperature

• Maximum temperature for each heater: ≤ 650℃.
• Maximum temperature difference between two heaters: ≤ 300℃, depending on the distance between two heaters.

Heating and Cooling Rates

• Heating: < 8℃/s (single heating unit only).
• Cooling: < 10℃/s (600 - 100℃) maximum.

Thermocouple

• Two type K thermocouples (exposed) are separately installed on the upper and lower heating elements.

Operating Voltage

• 208 - 240VAC, single-phase, 20A air circuit breaker.

Power Requirements

• 2200 W in total (1100 W for each heater).

Warranty

• One-year limited warranty with lifetime support (consumable parts such as quartz tubes and heating lamps are excluded from the warranty).

Compliance

• CE certified.