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CY11153 Palladium (Pd) Coated Silicon Wafer

Catalogue Number CY11153
Material Palladium, Silicon
Purity Pd: ≥99.95%
Form Substrate

Palladium (Pd) Coated Silicon Wafer is engineered with a thin palladium layer sputter-deposited on a silicon substrate to address specific challenges in semiconductor processes. Stanford Advanced Materials (SAM) employs precise deposition techniques and in-line surface quality inspections using advanced metrology tools. This approach minimises surface defects and ensures uniformity, providing an effective interface for subsequent processing steps while maintaining strict process controls.

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FAQ

How does the palladium coating influence the wafer's performance in semiconductor processing?

The palladium coating acts as a diffusion barrier during thermal processing, reducing metal migration and oxidation risks. This controlled interface enhances process stability and consistency in microfabrication environments.

What are the recommended cleaning procedures before integrating these wafers into semiconductor processes?

Standard semiconductor cleaning protocols using RCA procedures are advised. These procedures remove organic and inorganic contaminants without compromising the palladium layer’s structural integrity.

Can the wafer be integrated with existing silicon processes without additional modifications?

Yes, the substrate's compatibility with standard processing apparatus allows integration into existing silicon process flows. Minor adjustments may be necessary to accommodate the influence of the metal coating during thermal cycles. For further details, contact us.

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