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ST11193 Indium Tin Rotary Target, InSn Target

Catalogue Number ST11193
Composition In, Sn
Purity ≥99.99%, or customized
Form Target
Shape Tubular
Dimensions Customized

Indium Tin Rotary Target, InSn Target is a sputtering target composed of Indium-Tin alloy, engineered for deposition processes in semiconductor and flat panel display manufacturing. Stanford Advanced Materials (SAM) employs advanced alloy blending and surface analysis using X-ray fluorescence and profilometry to reduce material variance. Rigorous quality control through batch testing and statistical process control ensures that target composition and surface uniformity meet precise process specifications.

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FAQ

What process adjustments are required when switching to an InSn sputtering target?

Process adjustments may include recalibrating deposition power and gas flow rates to accommodate different sputter yields and thermal characteristics. Operators should evaluate uniformity and adhesion using in-situ monitoring systems. Contact us for detailed guidelines.

How does the rotational design of the target improve deposition uniformity?

The rotary mechanism promotes even erosion over the target surface, leading to consistent film thickness on the substrate. Continuous rotation minimises localized overheating. Users are advised to integrate this design with standard process parameter optimisation.

Can target composition tolerances affect film properties during sputtering?

Yes, slight deviations in alloy composition can influence film conductivity, optical transparency, and mechanical stress. It is essential to monitor the composition using material characterisation techniques to maintain process reproducibility. Contact us for further technical details.

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