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ST11208 Silicon Planar Target, Si Target

Catalogue Number ST11208
Composition Si
Purity ≥99.99%, or customized
Form Target
Shape Rectangular
Dimensions Customized

Silicon Planar Target, Si Target is a sputtering target fabricated from silicon with a precise planar surface finish. Stanford Advanced Materials (SAM) employs controlled fabrication processes including in-line metrology and surface inspection to monitor flatness and impurity levels. This approach minimises defects and ensures uniform material properties essential for deposition processes. The product benefits from detailed batch testing protocols that verify dimensional accuracy before shipment.

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FAQ

How does the flat surface finish of the silicon target affect sputtering performance?

The planar surface finish ensures a consistent deposition rate across the substrate, thereby minimising film thickness variations. Uniformity in sputtering directly contributes to improved reproducibility in thin film properties.

What handling procedures are recommended to avoid contamination of the silicon target?

Utilise appropriate clean-room protocols, including anti-static handling and the use of gloves. Minimising exposure to airborne particulates and humidity is critical to preserve the target's surface integrity and optimal sputtering performance.

In what way does customisation of the target dimensions influence process integration?

Customising dimensions allows the target to conform to specific sputtering system requirements, ensuring compatibility with deposition chambers. This adaptability facilitates more efficient process integration and maximises film uniformity. Contact us for further details.

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