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ST11216 Tantalum Silicide Planar Target, TaSi2 Target

Catalogue Number ST11216
Composition TaSi2
Purity ≥99.9%, or customized
Form Target
Shape Rectangular
Dimensions Customized

Tantalum Silicide Planar Target, TaSi2 Target is manufactured from TaSi2 using controlled melting and planarisation techniques to achieve consistent microstructural properties. Stanford Advanced Materials (SAM) utilises electron microscopy and X-ray diffraction for batch verification, ensuring uniform composition and grain structure. The production process includes statistical sampling and precise surface analysis, which safeguards adherence to stringent specifications and supports reproducible deposition performance.

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FAQ

How does the microstructure of TaSi2 targets influence sputtering performance?

The microstructure directly governs film uniformity by affecting deposition rate consistency and interface quality. Well-controlled grain boundaries reduce particulate scattering, thereby enhancing film adhesion and uniformity during sputter deposition.

What quality control measures are implemented during the production of TaSi2 sputtering targets?

SAM employs electron microscopy and X-ray diffraction to assess grain structure and compositional uniformity. Batch-specific sampling and compositional assays are conducted to ensure strict adherence to defined material specifications.

Are there specific handling or storage conditions recommended for TaSi2 targets to maintain their integrity?

These targets should be stored in a dry, temperature-controlled environment. Use of antistatic containers and minimal handling protocols is advised to avoid surface contamination and oxidation prior to sputtering applications.

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