1200C Dual Sliding Tube Furnace for CVD OTF-1200X-S2-50SL-CVD Description
The 1200C Dual Sliding Tube Furnace for CVD OTF-1200X-S2-50SL-CVD is a double sliding furnace on a rail, specifically designed for thermal chemical vapour deposition (CVD). It features a 2" OD x 55" L quartz tube with flanges and can achieve a maximum operating temperature of 1200°C. This unique design allows for two 2" tube furnaces to be moved along the rail, facilitating optimal positioning for the thermal evaporation/sublimation of precursors and layer deposition.
Moving the furnace from one side to the other allows for rapid heating and cooling rates of up to 100°C/min. Optional features include motorised sliders for enhanced automation, mass flow controller (MFC) gas supply systems, and an RF plasma generator. These options enable the construction of a flexible and cost-effective thermal CVD system (TCVD) suitable for a variety of research and industrial applications.
1200C Dual Sliding Tube Furnace for CVD OTF-1200X-S2-50SL-CVD Specifications
Tube Furnace Series OTF-1200X
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Furnace Construction
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- Double-layer steel construction: Both furnaces consist of double-layered steel that withstands temperatures up to 1200°C.
- Heating zones and constant temperature zones: Each furnace has a 200 mm long heating zone and a 60 mm long constant temperature zone, ensuring precise thermal control.
- Sliding rail system: Equipped with a pair of sliding rails at the bottom, allowing manual adjustment side to side with a maximum sliding distance of 400 mm, which simplifies flexible positioning and operation.
- Ready-to-use vacuum flanges: The vacuum flanges are pre-installed for immediate setup and use, ensuring quick integration into vacuum systems for various applications.
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Heating Elements
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Fe-Cr-Al alloy, doped with Molybdenum
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Power
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2.5KW, 208-240VAC, single-phase, 50/60Hz
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Operating Temperature
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- Max temperature: 1200°C (1 hour); 1100°C (continuous)
- Heating rate: ≤20°C/min
- Temperature accuracy: ±1.0°C
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Heating Zone Length
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200 mm (~8") for each furnace
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Constant Temperature Zone
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60 mm
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Processing Tube Size
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High-purity quartz glass tube
Size: 50mm outer diameter x 44mm inner diameter x 1500 mm length
Optional: S310 high-temperature resistant tube available for higher pressure (100 PSI) at an additional cost
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Temperature Control
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- Both furnaces feature automatic PID control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
- Built-in over-temperature alarm and protection enable unattended operation.
- Two K-type thermocouples included.
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Vacuum Flanges
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- Stainless steel vacuum flanges with a vacuum gauge are mounted at both ends of the tube with a sturdy bracket.
- An optional flange with a KF25 vacuum connection and a digital vacuum gauge is available for an additional cost, as well as a cold water flange.
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Sliding Rails / Table
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- Double sliding rail made from chrome-plated steel
- Rail length: 1200 mm
- Two sliding stop clamps are included to maintain the position of the furnaces.
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Dimensions
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- Furnace: 340 x 300 x 400 mm
- Total: 1600 x 430 x 500 mm (furnaces + slide)
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Net Weight
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~ about 80 kg
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Shipping Package Size
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70" x 45" x 45" (inches)
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Warranty
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Limited manufacturer’s warranty of one year (wear parts such as processing tubes, O-rings, and heating elements are excluded from the warranty; please order replacements from the corresponding products below).
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Compliance
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CE certified
NRTL or CSA certification available upon request and at an additional cost.
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Notes
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- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa.
- Warning! A two-stage pressure regulator must be installed on the gas cylinder to limit pressure to below 3 PSI for safe operation.
- The gas flow rate should be limited to < 200 SCCM (or 200 ml/min) to reduce thermal shocks to the tube.
- Definition of the vacuum limit for all quartz tube furnaces: * Vacuum pressure can only be safely used up to 1000°C.
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1200C Dual Sliding Tube Furnace for CVD OTF-1200X-S2-50SL-CVD Applications
Enables the deposition of thin films and coatings onto substrates through thermal processes.
Used in the manufacture of semiconductors, photovoltaic cells, and advanced materials.
Facilitates the synthesis of nanomaterials such as carbon nanotubes and graphene through controlled thermal processes.
Supports the development of high-performance ceramics and composites.
- Evaporation/Sublimation of Precursors:
Positions two tube furnaces on a sliding rail to optimise thermal evaporation or sublimation processes for precursors.
Allows precise positioning for uniform layer deposition and material processing.
- High Heating and Cooling Rates:
Achieves fast heating and cooling rates of up to 100°C/min, which is crucial for optimising processing times and material properties.
- Flexible System Configuration:
Offers optional features such as motorised sliders, mass flow controller (MFC) gas supply systems, and the integration of RF plasma generators.
Enables easy adaptation to specific research or industry requirements.
1200C Dual Sliding Tube Furnace for CVD OTF-1200X-S2-50SL-CVD Packaging
Our 1200C Dual Sliding Tube Furnace for CVD OTF-1200X-S2-50SL-CVD is handled carefully during storage and transport to maintain the quality of our product in its original condition.
Specification
OTF-1200X Series Tube Furnace
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Furnace Structure
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- Double-Layer Steel Structures: Both furnaces are constructed with double-layer steel, capable of withstanding temperatures up to 1200°C.
- Heating and Constant Temperature Zones: Each furnace features a 200mm heating zone and a 60mm long constant temperature zone, ensuring precise thermal control.
- Sliding Rail System: Equipped with a pair of sliding rails at the bottom, allowing manual adjustment from side to side with a maximum sliding distance of 400mm, facilitating flexible positioning and operation.
- Ready-to-Use Vacuum Flanges: Vacuum flanges are pre-installed for immediate setup and usage, ensuring quick integration into vacuum systems for various applications.
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Heating Elements
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Fe-Cr-Al Alloy doped by Mo
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Power
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2.5KW, 208-240VAC, Single Phase, 50/60Hz
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Working Temp.
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- Max. Temp: 1200℃ (1 hr); 1100℃ (continuous)
- Heating Rate: ≤20℃/min
- Temp. accuracy: ±1.0℃
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Heating Zone Length
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200 mm (~8") for each furnace
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Constant Temperature Zone
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60 mm
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Processing Tube Size
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High purity fused quartz tube
Size: 50mm O.D x 44mm I.D x1500 mm Length
Optional: S310 high temp alloy tube is available for higher pressure (100 PSI) at the extra cost
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Temp. Controller
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- Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
- Built-in over-temperature alarm and protection allow for operation without an attendant.
- Two K-type thermal couples are included.
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Vacuum Flanges
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- Stainless steel vacuum flanges with a vacuum gauge are installed on both ends of the tube with heavy-duty support.
- Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost, and water cold flange
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Sliding Rails / Table
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- Double sliding rail made by Cr-plated steel
- Sliding length: 1200 mm
- Two slide-stopping clamps are included for holding the position of the furnaces.
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Dimensions
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- Furnace: 340 x 300 x 400 mm
- Total: 1600 x 430 x 500 mm (furnaces + sliding)
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Net Weight
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~ 80 kg
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Shipping Package Size
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70" x 45" x 45" (inch)
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Warranty
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One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
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Compliance
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CE Certified
NRTL or CSA certification is available upon request at the extra cost
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Notes
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- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
- Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.
- The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
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