1700C Tube Furnace with High Vacuum System and MFC Gas Mixer GSL-1700X-4-HVC-LD Description
The 1700C tube furnace with high vacuum system and MFC gas mixer GSL-1700X-4-HVC-LD is a single-zone alumina tube furnace with a diameter of 60 mm, featuring a high vacuum pumping system that achieves up to 10^-5 Torr. It is equipped with digital 2-channel precision mass flow controllers, allowing precise control of two gas types for chemical vapour deposition (CVD) or diffusion processes. This furnace can operate at temperatures up to 1600°C, making it suitable for high-temperature applications requiring controlled atmospheres and precise gas management.
1700C Tube Furnace with High Vacuum System and MFC Gas Mixer GSL-1700X-4-HVC-LD Specifications
Tube Furnace of the GSL-1700X
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Furnace Design
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- Double-layer steel housing with air cooling: Provides insulation and structural integrity, ensuring safe operation.
- Two cooling fans: Maintains housing temperature below 55°C, enhancing reliability and durability.
- High-purity alumina refractory chamber: Ensures thermal stability and resistance to high temperatures, ideal for demanding applications.
- Mobile cart with four wheels: Facilitates mobility and positioning within the workspace, increasing flexibility.
- Ready-to-use vacuum and gas mixing system: Includes vacuum flange, pressure gauge, valves, pipes, and a high vacuum pump for immediate setup and operation, thereby ensuring convenience and efficiency.
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Processing Tube
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Material: High-purity alumina
An alumina tube with a 60 mm outer diameter (EQ-TA-60D-M1000) is included with the furnace.
The furnace can also be equipped with a 50 mm or 80 mm O.D. alumina tube at additional cost. Please contact us for further information.
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Heating Elements
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8 pieces of MoSi2 heating elements for 1800°C
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Power Supply
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AC 208-240V Single-phase, 50/60Hz
6KW
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Operating Temperature
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- Max. temperature: 1650℃ (1 hour); 1600℃ (continuous)
- Heating rate: ≤5℃/min
- Temperature accuracy: ±1.0℃
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Length of Heating Zone
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Heating zone length: 457 mm (18")
Constant temperature zone length: 150 mm (6") (+/-1°C)
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Temperature Control
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- Automatic PID control via phase angle current limiting, switching the resistance with 30 programmable segments.
- Temperature accuracy: ±1°C
- Thermocouple: Type B installed in the furnace
- RS485 communication interface.
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Vacuum Seal
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A pair of stainless steel vacuum flanges with:
- a mechanical vacuum gauge
- two needle valves
- a KF-25 connection and a KF-25 to KF-40 adapter for the high vacuum station.
- a 1/4" Swagelok hose connection
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Dimensions
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550 x 380 x 520 mm
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High Vacuum Station
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Power Supply
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100~110W
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Rated Voltage
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AC 208-240V single-phase, 50/60Hz
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Dimensions
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600(L) x 600(W) x 700(H), mm
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Construction
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Size of the mobile cart: 600 (L) x 600 (W) x 700(H), mm
Max. load: 600 lbs on top
Control panel of the molecular pump: LCD digital
Internal: vacuum pump
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Control Panel
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One-button operation - the membrane pump and the turbo pump start upon pressing the "Start" button.
System-controlled rotational speed - the controller adjusts the turbine speed up and down based on the vacuum level and leak rate of the reaction chamber.
Self-protection - the system protects the pump from damage due to overheating and overcurrent when the leak rate of the reaction chamber is too high to achieve a high vacuum.
LCD display - the two-line parameter verification interface facilitates handling of the equipment.
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Flow Rate
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Nitrogen N2 33 L/s
Helium He 39 L/s (2340L/Minute)
Hydrogen H2 32 L/s
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Working Pressure Range
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From 1000 mbar to <1E-7 mbar
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Final Pressure
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<1E-8 mbar (without leakage)
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Mass Flow Gas Control
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Construction
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Stainless steel 316 valve
Gas mixing chamber: Φ80X120mm
600mm(L) x 745mm(W) x 700mm(H)
6" colour touchscreen control panel for easy parameter setting.
Touchscreen control and PC remote control switchable.
The regulation range of the flow rate and a range of gas paths are available for adaptation. Please contact us for detailed information.
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Power Supply
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23 W per channel
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Rated Voltage
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AC 220V/50Hz Single-phase
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Notes and Warranty
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Application Notes
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The vacuum pressure should only be applied to alumina tubes up to 1500°C safely.
The tube furnaces with alumina tubes are designed for use under vacuum and low pressure < 0.12 MPa (absolute pressure).
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Warranty
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Limited warranty of one year (wear parts such as process tubes, O-rings, and heating elements are excluded from the warranty; please order replacement parts from the corresponding products below).
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Compliance
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- CE certified
- NRTL(UL61010) or CSA certification is available for an additional charge.
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Shipping Dimensions
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Two boxes on a plastic pallet: 45x45x35/box
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Warnings
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- The tube furnaces with alumina tubes are designed for use under vacuum and low pressure < 0.02 MPa/ 3 PSI.
- Warning! For safe operation, a two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI.
- Never heat the furnace when the gas exhaust valve is closed and a pressure is present in the furnace chamber. The manometer must be used to accurately monitor the condition of the chamber at all times during the heating process; please open the gas exhaust valve immediately once the chamber pressure exceeds 3 PSI to avoid unforeseen damage.
- The flow rate for gases should be limited to < 200 SCCM (or 200ml/min).
- The vacuum pressure can only be used safely up to 1500°C.
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1700C Tube Furnace with High Vacuum System and MFC Gas Mixer GSL-1700X-4-HVC-LD Applications
- Chemical Vapour Deposition (CVD):
Enables the deposition of thin films and coatings on substrates with controlled gas atmospheres.
Utilised in the manufacture of semiconductors, surface coatings, and the synthesis of nanomaterials.
Facilitates the controlled movement of atoms or molecules in solid materials.
Essential for the doping of semiconductor materials and the enhancement of material properties.
- High-Temperature Annealing and Sintering:
Ideal for annealing processes to enhance the crystallinity of materials and eliminate defects.
Supports the sintering of ceramics and metals for consolidation and improvement of mechanical properties.
- Research and Development:
Provides a controlled environment for investigating material behaviour and properties at high temperatures.
Indispensable for the exploration of new materials and processes in research laboratories.
1700C Tube Furnace with High Vacuum System and MFC Gas Mixer GSL-1700X-4-HVC-LD Packaging
Our 1700C Tube Furnace with High Vacuum System and MFC Gas Mixer GSL-1700X-4-HVC-LD is handled carefully during storage and transport to maintain the quality of our product in its original condition.
Specification
GSL-1700X Series Tube Furnace
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Furnace Structure
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- Double-Layer Steel Casing with Air Cooling: Provides robust insulation and structural integrity, ensuring safe operation.
- Dual Cooling Fans: Maintains case temperature below 55°C, enhancing reliability and longevity.
- High-Purity Alumina Refractory Chamber: Ensures thermal stability and resistance to high temperatures, ideal for demanding applications.
- Mobile Cart with Four Wheels: Facilitates easy mobility and positioning within the workspace, enhancing flexibility.
- Ready-to-Use Vacuum and Gas Mixing System: Includes vacuum flange, gauge, valves, pipes, and a high vacuum pump for immediate setup and operation, ensuring convenience and efficiency.
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Processing Tube
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Material: High Purity Alumina
One 60mm O.D. processing alumina tube (EQ-TA-60D-M1000) is included with the furnace.
The furnace can be also custom made to fit the 50mm or 80mm O.D. processing alumina tube at an extra cost, please contact us for more information.
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Heating Elements
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8 pcs 1800°C grade MoSi2 heating element
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Power
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AC 208-240V Single phase, 50/60Hz
6KW
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Working Temp.
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- Max. Temp: 1650℃ (1 hr); 1600℃ (continuous)
- Heating Rate: ≤5℃/min
- Temp. accuracy: ±1.0℃
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Heating Zone Length
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Heating zone length: 457 mm (18")
Constant Temperature Zone length: 150 mm (6") (+/-1°C)
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Temp. Control
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- PID automatic control via current limiting phase angle fired the resistor with 30 steps programmable segments.
- Temperature accuracy: ±1°C
- Thermocouple: B type built inside the furnace
- RS485 Communications Port.
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Vacuum Seal
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One pair of stainless steel vacuum flange with:
- one mechanical vacuum gauge
- two needle valves
- one KF-25 connector and KF-25 to KF-40 adapter for the high vacuum station.
- one 1/4" Swagelok tube connector
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Dimensions
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550 x 380 x 520 mm
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High Vacuum Station
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Power
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100~110W
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Rated Voltage
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AC 208-240V Single Phase, 50/60Hz
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Dimension
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600(L) x 600(W) x 700(H), mm
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Structure
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Mobile cart size: 600 (L) x 600 (W) x 700(H), mm
Max. Loading: 600 Lbs on top
Molecular pump control Panel: LCD digital
Inside: Vacuum pump
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Control Panel
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One button operation - the diaphragm pump and the turbopump will start after pressing "start" button.
System-controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.
Self-protection - the system will protect the pump from damage by overheating and over-current if the leaking rate of the reaction chamber is too high to achieve high vacuum.
LCD screen - double lines parameters checking interface make the working easier to be handled.
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Volume Flow Rate
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Nitrogen N2 33 L/s
Helium He 39 L/s (2340L/minute)
Hydrogen H2 32 L/s
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Working Range
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From 1000 mbar to <1E-7 mbar
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Ultimate Pressure
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<1E-8 mbar (without any leaking)
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Mass Flow Gas Control
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Structure
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Made of 316 stainless steel valve
Gas mixing tank: Φ80X120mm
600mm(L) x 745mm(W) x 700mm(H)
6" color touch screen control panel to make parameter setting at easy.
Touchscreen Control and PC remote switchable.
The flow rate control range and a number of gas routes are available for customization. Please contact us for detailed information.
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Power
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23W per channel
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Rated Voltage
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AC 220V/50Hz Single phase
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Notes and Warranty
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Application Notes
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Vacuum pressures may only be safely used up to 1500°C for alumina tubes
The tube furnaces with alumina tubes are designed for use under vacuum and low pressure < 0.12 MPa (absolute pressure)
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Warranty
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One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacements at related products below.)
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Compliance
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- CE Certified
- NRTL(UL61010) or CSA certification is available at extra cost.
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Shipping Dimensions
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Two cases in one plastic pallet: 45x45x35/case
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Warnings
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- The tube furnaces with alumina tubes are designed for use under vacuum and low pressure < 0.02 MPa/ 3 PSI
- Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.
- Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages.
- The flow rate for gases should be limited to < 200 SCCM ( or 200ml/min )
- Vacuum pressures may only be safely used up to 1500°C
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