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AL3258 Electrostatic Chuck (Al2O3, AlN, Sapphire)

Catalogue Number AL3258
Material Al2O3, AlN, Sapphire
Dimensions Designed for φ200/300mm Equipment
Purity ≥99.9%

Electrostatic chucks are characterised by high purity, high plasma resistance, and effective clamping/releasing behaviour for both high and low temperature applications. Stanford Advanced Materials (SAM) possesses extensive experience in the manufacturing and supply of high-quality aluminium oxide products.

Related products: Aluminium oxide sapphire crystal substrate, Sapphire windows, Sapphire wafers, Aluminium nitride machined parts

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