Discontinued IF5726 (Discontinued) 950C CSS and RTP Furnace OTF-1200X-RTP-II-CSS-300

Features

• A 20-inch stainless steel vacuum chamber, achieving a vacuum of up to 10^-5 Torr with a turbopump.
• Two 12-inch infrared heating plates (IR), strategically positioned within the chamber to optimise heat distribution.
• A Eurotherm precision temperature controller, ensuring a temperature accuracy of ±0.1 °C.
• A touchscreen computer, allowing comprehensive control over all processing parameters.

Basic Parameters

• Max. Heating Temp.: 950℃
• Max. Temperature Difference between the two heaters: ≤ 300℃
• Max. Heating Rate: 8℃/s
• Max. Cooling Rate: <20℃/s

Power

208 - 240VAC, three phases, 50/60 Hz

60kW

Vacuum Chamber

• Chamber Dimensions: ID 500mm x H 460mm
• Two quartz windows with a diameter of 60mm are installed for easy observation.
• A hermetically sealed movable diverting plate is incorporated to block the evaporation source under high vacuum.
• A precise, corrosion-resistant digital vacuum gauge is included as standard equipment, ensuring accurate vacuum measurements.
• Optional vacuum pump: 10^-5 Torr with a turbopump or 10^-2 Torr with a mechanical pump.

Heating and Sample Holding

• Two IR heaters located at the top and bottom of the chamber with adjustable distances of 2 - 25mm.
• The heating elements are made from stainless steel and equipped with a cold water jacket to ensure thermal insulation.
• The round wafer holder, with a diameter of 12 inches, is integrated into the upper heater to support the substrate.
• The graphite plates are mounted on top of the IR emitter to ensure more uniform heating.
• The upper sample holder rotates with an adjustable speed of 1 - 10 RPM.
• A water cooler with a circulation capacity of 58 l/min is installed to cool the heating elements.

Control System

• Two digital Eurotherm 3000 temperature controllers with 24 programmable segments allow for the independent control of the upper and lower heating elements with an accuracy of +/- 0.1ºC.
• All processes, including temperature profiles, vacuum pressure, rotational speed, turning speed, and flange lift, are controlled by a touchscreen computer via a PLC.
• The computer can display temperature and vacuum profiles and initiate 10 preset processing programmes.

Net Weight

~500 kg

Dimensions

L 1450 X W 1250 X H 2100 mm

Warranty

• One-year limited warranty with lifetime support.
• NOTE: Damages caused by the use of corrosive and acidic gases are not covered under the one-year limited SAM warranty.

Certification

• CE certified
• NRTL or CSA certification available at an additional cost.