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IF5733 (Discontinued) 1200C Sliding Tube Furnace for Rapidly Thermal Processing OTF-1200X-RTP-5S

Discontinued IF5733 (Discontinued) 1200C Sliding Tube Furnace for Rapidly Thermal Processing OTF-1200X-RTP-5S

Catalogue Number	IF5733
Item Number	OTF-1200X-RTP-5S
Operating Temperature	≤1100℃ continuous

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The1200C Glide Tube Furnace for rapid thermal processing is a versatile 5-inch glide tube furnace, equipped with a resistance heater and an electric glide motor for efficient and rapid heating and cooling. Stanford Advanced Materials (SAM) has extensive experience in manufacturing and supplying high-quality glide tube furnaces.

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1200C Sliding Tube Furnace for Rapid Thermal Processing OTF-1200X-RTP-5S Description

The 1200C Sliding Tube Furnace for Rapid Thermal Processing OTF-1200X-RTP-5S is a versatile 5-inch sliding furnace equipped with a resistance heater and an electric sliding motor for efficient rapid heating and cooling. It achieves maximum heating and cooling rates of 2°C and 4°C per second respectively, and is capable of annealing wafers with a diameter of up to 4 inches at temperatures reaching 1200°C. The device is housed in a double-layer steel casing with air cooling to ensure that the temperature of the furnace casing remains at or below 60°C.

1200C Sliding Tube Furnace for Rapid Thermal Processing OTF-1200X-RTP-5S Specifications

Furnace Construction	Double-layer steel casing with air cooling: ≤60℃ Separate temperature control unit for remote operation Extended heating zone Dynamic sliding rails: allow horizontal movement of the furnace from side to side Annealing of wafers up to a diameter of max. 4" with quartz boat Quartz tube: 5" quartz tube (130mm outer diameter x 120mm inner diameter x 1100mm L) included with airtight flanges
Power	3KW, 208-240VAC, single-phase, 50/60Hz
Working Temperature	Max. temperature: 1200℃ (<30 min); 1100℃ continuous Heating rate: ≤20℃/min
Sliding Mechanism	Double sliding rails made of Cr-coated steel Length of sliding rail: 1200 m Sliding range: 450 mm Optional: Automated sliding driven by a DC motor and controlled by the temperature controller. Upon completion of the heating programme, the furnace slides from right to left at the set speed. Fans expel the heated areas to achieve rapid cooling.
Temperature Controller	Two automatic PID controllers with 30 programmable segments to control heating and cooling rates and dwell times. Built-in over-temperature and thermoelement break protection. Temperature accuracy +/- 1℃. RS485 communication port. PC control
Vacuum Controller	Limited by a vacuum pump 10^-2 Torr can be achieved with a mechanical pump 10^-5 Torr can be achieved with a molecular pump
Net Weight	110 kg
Dimensions	1300 x 550 x 600 mm (furnace closed) 1300 x 750 x 850 mm (furnace open) 350 x 250 x 410 mm (control box)
Warranty	Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 MPa Warning! For safe operation, a two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI. Vacuum pressures can be safely used only up to 1000°C.
Certificate	CE certified An NRTL or CSA certification is available for an additional fee.

1200C Sliding Tube Furnace for Rapid Thermal Processing OTF-1200X-RTP-5S Applications

Semiconductor processing: One of the primary applications of RTP furnaces is in the semiconductor industry, where they are used to anneal semiconductor wafers.
Material synthesis and experimentation: These furnaces are ideal for synthesising new materials, including metals, ceramics, and composites, particularly when processes require precise temperature control and rapid heating and cooling cycles.
Coatings: RTP is utilised for applying various types of coatings to substrates, including thin films and multilayer coatings, essential for the manufacture of electronic and optical devices.
Research and development: RTP furnaces are frequently used in scientific research to investigate the effects of high temperatures on various materials and the kinetics of phase transformations.

1200C Sliding Tube Furnace for Rapid Thermal Processing OTF-1200X-RTP-5S Packaging

Our 1200C Sliding Tube Furnace for Rapid Thermal Processing OTF-1200X-RTP-5S is carefully handled during storage and transport to maintain the quality of our product in its original condition.

Specification

Furnace Structure	Double-Layer Steel Casing with Air Cooling: ≤60℃ Separated Temperature Control Unit for Remote Operation Extended Heating Zone Dynamic Sliding Rails: which allow the furnace to move horizontally from one side to the other Annealing wafer up to 4" diameter max. with quartz boat Quartz tube: 5" quartz tube (130mm O.D x 120mm I.D x 1100mmL) is included with airtight flanges
Power	3KW, 208-240VAC, Single Phase, 50/60Hz
Working Temp.	Max. Temp: 1200℃(<30min); 1100℃ continuous Heating Rate: ≤20℃/min
Sliding Control	Dual sliding rails made of Cr plated steel Sliding rail length: 1200 m Sliding Range: 450mm Optional: Automatic sliding is driven by DC motor. is controlled by the temperature controller. When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow the heated areas to achieve fast cooling.
Temperature Controller	Two PID automatic controllers with 30 programmable segments for control of heating & cooling rate, and dwell time. Built-in overheating & thermocouple broken protection. +/- 1℃ temperature accuracy. RS485 Communications Port. PC Control
Vacuum Controller	Limited by a vacuum pump 10^-2 torr can be achieved by a mechanical pump 10^-5 torr can be reached by a molecular pump
Net Weight	110kg
Dimension	1300x 550 x 600 mm (furnace close) 1300x 750 x 850 mm (furnace open) 350x 250 x 410 mm (control box)
Warranty	Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 MPa Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Vacuum pressures may only be safely used up to 1000°C
Certificate	CE Certified NRTL or CSA certification is available at extra cost.

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Discontinued IF5733 (Discontinued) 1200C Sliding Tube Furnace for Rapidly Thermal Processing OTF-1200X-RTP-5S

Withdrawn

1200C Sliding Tube Furnace for Rapid Thermal Processing OTF-1200X-RTP-5S Description

1200C Sliding Tube Furnace for Rapid Thermal Processing OTF-1200X-RTP-5S Specifications

1200C Sliding Tube Furnace for Rapid Thermal Processing OTF-1200X-RTP-5S Applications

1200C Sliding Tube Furnace for Rapid Thermal Processing OTF-1200X-RTP-5S Packaging

Specification

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