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ST11178 Iron Cobalt Boron Rotary Target, CoFeB Target

Catalogue Number ST11178
Composition CoFeB
Purity ≥99.9%, or customized
Form Target
Shape Tubular
Dimensions Customized

Iron Cobalt Boron Rotary Target, CoFeB Target is fabricated with a controlled alloy composition to ensure uniform sputtering characteristics. Stanford Advanced Materials (SAM) employs dedicated vacuum arc melting followed by rigorous SEM and EDS analysis to verify material homogeneity. The product is processed under strict metallurgical conditions to reduce microstructural inconsistencies that can impact film uniformity in low-pressure sputtering processes.

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FAQ

What factors influence the sputtering behaviour of the CoFeB target during thin film deposition?

Sputtering behaviour is influenced by alloy homogeneity, target density, and microstructural features. Variations in these parameters can affect deposition rate and film uniformity. Detailed quality control using SEM can verify the necessary material characteristics for optimised performance.

How does the rotary design of the target enhance its performance in sputtering processes?

The rotary design enables uniform erosion across the target surface, reducing localized overheating and maintaining even material distribution. This promotes consistent deposition characteristics, particularly important for applications that demand uniform film coatings across large substrates.

What are the recommended maintenance practices for extending the service life of CoFeB sputtering targets?

Regular inspection for surface wear, maintaining proper cooling during sputtering, and adhering to controlled storage conditions are necessary. These practices help prevent contamination and physical degradation, thereby extending the operational life of the target. For further details, contact us.

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