1200C Tube Furnace with Corrosion Protection Set OTF-1200X-F3LV Description
The 1200C Tube Furnace with Corrosion Protection Set OTF-1200X-F3LV is a split single-zone tube furnace featuring a quartz tube with an 80 mm diameter, a mechanical vacuum pump, and a three-channel gas flow system. It can achieve a maximum vacuum of up to 10^-2 Torr and can mix 1-3 types of gases for chemical vapour deposition (CVD) or diffusion processes. This furnace system is equipped with a PTFE gas system set that provides superior corrosion protection compared to stainless steel. The system includes a corrosion protection manometer, a vacuum pump with a cold trap, and the PTFE gas mixing system with a flange, ensuring durability and precision when handling aggressive gases.
1200C Tube Furnace with Corrosion Protection Set OTF-1200X-F3LV Specifications
Tube Furnace of the OTF-1200X series
|
Furnace Construction
|
- Double-layer steel housing with air cooling: Enhances durability and safety
- Built-in thermostat: Automatically activates the cooling system when the housing temperature exceeds 55°C
- Anti-corrosion measuring device: Allows accurate vacuum measurements even in the presence of aggressive gases
- Vacuum pump with cold trap: Protects the vacuum pump by preventing aggressive gases from entering it
- PTFE gas mixer and flange: Minimises contact of aggressive gases with susceptible surfaces
|
|
Heating Elements
|
Fe-Cr-Al alloy, doped with Mo
|
|
Power
|
2.5KW, 208-240VAC, single-phase, 50/60Hz
|
|
Working Temp.
|
- Max. temperature: 1200℃ (1 hr.); 1100℃ (continuous)
- Heating rate: ≤20℃/min
- Temperature accuracy: ±1.0℃
|
|
Length of the Heating Zone
|
400 mm
|
|
Temperature Control
|
- Automatic PID control via SCR (Silicon Controlled Rectifier) power regulation with phase-cut control, current limiting resistor.
- 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
- Built-in PID auto-tune function with overheating and thermocouple break protection.
- Overtemperature protection and alarm enable operation without supervision.
- ±1 ºC temperature accuracy.
- RS485 communication port.
*Advanced temperature control (optional)
|
|
Tube Size and Materials
|
Quartz tube
OD: 80mm x ID: 75 mm x Length: 1000 mm
|
|
Digital Vacuum Gauge
|
- Corrosion-resistant capacitive membrane gauge with ceramic-coated sensor head, specifically designed for vacuum measurements in the presence of corrosive gases.
- The gauge is installed on the vacuum flange (right side) of the tube furnace and offers a wide measurement range (10^-5 ~ 1000 Torr).
|
|
Flanges for Vacuum Sealing
|
A set of PTFE flanges with vacuum gauge and valve.
|
|
Vacuum Pump
|
- A two-stage rotary vane vacuum pump with a capacity of 156 l/m and a maximum vacuum pressure of 10E-4 Torr is included.
- A stainless steel hose for connecting to the tube furnace is included.
- A cold trap is included to capture corrosive materials.
|
|
Flow Meter & Pressure Gauge
|
A PTFE three-channel gas mixer is installed inside the mobile casing to facilitate monitoring of gas flow rates.
|
|
Dimensions
|
- Furnace: 550 x 380 x 520 mm
- Lower mobile case: 600 x 600 x 650 mm
|
|
Net Weight
|
~ approximately 70 kg
|
|
Shipping Weight
|
350 lbs
|
|
Shipping Dimensions
|
Two boxes on a pallet: 45 "x45 "x35" /box
|
|
Warranty
|
Limited manufacturer’s warranty of 1 year (wear parts such as processing tubes, O-rings, and heating elements are excluded from the warranty; please order replacements from the products listed below).
|
|
Compliance
|
CE certified
NRTL or CSA certification is available upon request and at an additional cost.
|
|
Notes
|
- To achieve an accurate temperature inside the tube furnace, calibration of the temperature is required.
- Warning: Tube furnaces with quartz tubes are designed for use in vacuum and at low pressure < 0.2 bar.
- Caution! A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation.
- The gas flow rate should be limited to <200 SCCM to reduce thermal shocks on the tube.
- Vacuum pressure can only be safely used up to 1000°C.
|
1200C Tube Furnace with Corrosion Protection Set OTF-1200X-F3LV Applications
- Chemical Vapour Deposition (CVD):
Ideal for depositing thin films and coatings on various substrates.
Used in the manufacture of semiconductor devices and photovoltaic cells.
Facilitates the movement of atoms or molecules in solids.
Essential for the development and processing of semiconductor materials.
- Thermal Treatments under Vacuum:
Enables annealing, sintering, and other heat treatments in a controlled vacuum environment.
Reduces contamination and oxidation and improves material properties.
- Protection against Protective Gas:
Equipped with a PTFE gas system for excellent corrosion protective properties.
Suitable for experiments requiring the use of corrosive or reactive gases.
1200C Tube Furnace with Corrosion Protection Set OTF-1200X-F3LV Packaging
Our 1200C Tube Furnace with Corrosion Protection Set OTF-1200X-F3LV is carefully handled during storage and transport to maintain the quality of our product in its original condition.
Specification
OTF-1200X Series Tube Furnace
|
Furnace Structure
|
- Double-Layer Steel Casing with Air Cooling: Ensures enhanced durability and safety
- Built-In Thermostat: Automatically activates the cooling system when the casing temperature exceeds 55°C
- Anti-Corrosive Gauge: Enables accurate vacuum measurements, even in the presence of aggressive gases
- Vacuum Pump with Cold Trap: Protects the vacuum pump by preventing aggressive gases from reaching it
- PTFE Gas Mixer and Flange: Minimizes contact of aggressive gases with susceptible surfaces
|
|
Heating Elements
|
Fe-Cr-Al Alloy doped by Mo
|
|
Power
|
2.5KW, 208-240VAC, Single Phase, 50/60Hz
|
|
Working Temp.
|
- Max. Temp: 1200℃ (1 hr); 1100℃ (continuous)
- Heating Rate: ≤20℃/min
- Temp. accuracy: ±1.0℃
|
|
Heating Zone Length
|
400 mm
|
|
Temp. Controller
|
- PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
- 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Built in PID Auto-Tune function with overheating & broken thermocouple protection.
- Over temperature protection and alarm allows for operation without attendant(s).
- ±1 ºC temperature accuracy.
- RS485 Communications Port.
*Advanced Temperature Control (Optional)
|
|
Tube Size and Materials
|
Quartz tube
OD: 80mm x ID: 75 mm x Length: 1000 mm
|
|
Digital Vacuum Gauge
|
- Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
- Gauge is installed on the vacuum flange (right side) of the tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
|
|
Vacuum Sealing Flanges
|
A set of PTFE flanges with both vacuum gauge and valve.
|
|
Vacuum Pump
|
- 156 L/m Double-Stage Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10E-4 torr.
- Stainless steel hose tube is included for connecting to tube furnace.
- A cold trap is included to capture corrosive material.
|
|
Flow Meter & Pressure Meter
|
One PTFE three-channel gas mixer is installed inside the mobile case to enable monitoring of gas flow rates.
|
|
Dimensions
|
- Furnace: 550 x 380 x 520 mm
- Bottom Mobile case: 600 x 600 x 650 mm
|
|
Net Weight
|
~ 70 kg
|
|
Shipping weight
|
350 lbs
|
|
Shipping Dimensions
|
Two cases in one pallet: 45"x45"x35" /case
|
|
Warranty
|
One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
|
|
Compliance
|
CE Certified
NRTL or CSA certification is available upon request at the extra cost
|
|
Notes
|
- To obtain an accurate temperature inside the tube furnace, you need to calibrate the temperature by yourself.
- Warning: Tube furnaces with quartz tube are designed for use with vacuum and low pressure < 0.2 bar
- Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation.
- The flow rate for gases should be limited to<200 SCCM for reducing thermal shocks to the tube
- Vacuum pressures may only be safely used up to 1000°C
|
CUSTOMER REVIEWS
No reviews for current products.
Write for Us
Converters & Calculators
