AC5591 Electrostatic Chuck (Al2O3, SiO2, MgO)

Electrostatic Chuck Description

The electrostatic chuck (ESC) is a critical component used in semiconductor manufacturing equipment, particularly in plasma etching, chemical vapour deposition (CVD), and physical vapour deposition (PVD). It serves to securely hold and release semiconductor wafers or substrates during processing. The ESC operates based on electrostatic force; when a voltage is applied, it generates an electrostatic field that clamps the wafer without physical contact, ensuring uniform cooling and heating of the wafer, as well as excellent flatness and minimal contamination of the backside.

Al2O3 (alumina), SiO2 (silica), and MgO (magnesia) are typically used as dielectric layers or components in the construction of electrostatic chucks due to their excellent electrical insulation properties, thermal stability, and chemical resistance.

Electrostatic Chuck Specifications

Electrostatic Chuck Applications

• Plasma Etching: ESCs are extensively used in plasma etching processes to securely hold semiconductor wafers.
• Chemical Vapour Deposition (CVD): In CVD processes, ESCs assist in maintaining the wafer in a fixed position under high temperatures and reactive chemical environments.
• Physical Vapour Deposition (PVD): During PVD processes, ESCs ensure that wafers remain flat and stable, facilitating uniform deposition of metal or dielectric layers.
• Ionic Implantation: ESCs are used to hold wafers during ionic implantation, wherein ions are embedded into the wafer surface to alter its electrical properties. The chuck ensures precise positioning and stability of the wafer under the ion beam.
• Photolithography: Although less common than in etching and deposition processes, ESCs can also be employed in photolithography to maintain the stability of wafers during exposure to light patterns. Stability is vital to achieving the high precision required for structuring.

Electrostatic Chuck Packaging

Our electrostatic Chuck is handled with care during storage and transportation to maintain the quality of our product in its original condition.