Discontinued IF5727 (Discontinued) 800C CSS and RTP Furnace RTP-II-5-R

Features

• A 20-inch internal vacuum chamber made of stainless steel, achieving a vacuum of up to 10^-5 Torr with the aid of a turbo pump.
• Two 12-inch infrared heating plates (IR) strategically positioned in the chamber to optimise heat distribution.
• A Eurotherm precision temperature controller ensuring a temperature accuracy of ±0.1°C.
• A touchscreen computer allowing comprehensive control over all processing parameters.

Basic Parameters

• Max. heating temperature: 950℃
• Max temperature difference between the two heaters: ≤ 300℃
• Max heating rate: 8℃/s
• Max cooling rate: < 20℃/s

Power

208 - 240VAC, three-phase, 50/60 Hz

60kw

Vacuum Chamber

• Chamber dimensions: ID 500mm x H 460mm
• Two quartz windows with a diameter of 60 mm are incorporated for easy observation.
• A hermetically sealed, movable deflector plate is included to block the evaporation source under high vacuum.
• A precise, corrosion-resistant digital vacuum gauge is included as standard equipment, ensuring accurate vacuum measurements.
• Optional vacuum pump: 10-5 Torr via turbo pump or 10-2 Torr via a mechanical pump.

Heating and Sample Holding

• Two IR heaters are situated above and below in the chamber with adjustable distances from 2 - 25 mm.
• The heating elements are made of stainless steel and fitted with a cold water jacket to ensure thermal insulation.
• The round wafer holder with a diameter of 12" is integrated into the upper heater to hold the substrate.
• Graphite plates are mounted on the top of the IR emitter to ensure more uniform heating.
• The upper sample holder is rotatable at an adjustable speed of 1 - 10 RPM.
• A water cooler with a circulation rate of 58 l/min is built-in to cool the heating elements.

Control System

• Two digital Eurotherm 3000 temperature controllers with 24 programmable segments enable independent regulation of the upper and lower heating elements with an accuracy of +/- 0.1°C.
• All processes such as temperature profiles, vacuum pressure, rotation speed and flange lifting are controlled by a touchscreen computer via a PLC.
• The computer can display temperature and vacuum profiles and launch 10 pre-set programmes for processing.

Net Weight

~500 kg

Dimensions

L 1450 X W 1250 X H 2100 mm

Warranty

• One-year limited warranty with lifetime support.
• WARNING: Damage caused by the use of corrosive and acidic gases is not covered under the one-year limited SAM warranty.

Certification

• CE certified
• NRTL or CSA certification available for an additional fee.